Polishing method, polishing agent and cleaning agent for polishing

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United States of America Patent

PATENT NO 11986920
APP PUB NO 20210299814A1
SERIAL NO

17010729

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, a polishing method includes supplying a polishing agent to be between a polishing pad and to-be-polished surface, then polishing the to-be-polished surface with the polishing agent while rotating at least one of the to-be-polished surface and the polishing pad. The polishing agent includes abrasive grains and an organic polymer. The organic polymer makes a reversible phase transition between a gel state and a sol state depending on temperature.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kataoka, Yumiko Yokkaichi Mie, JP 3 14
Matsui, Yukiteru Nagoya Aichi, JP 87 573
Sakashita, Mikiya Nagoya Aichi, JP 5 1

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