Method of lithography process and transferring a reticle

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11982944
APP PUB NO 20230305404A1
SERIAL NO

18326210

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method of lithography process is provided. The method includes forming a conductive layer over a reticle. The method includes applying ionized particles to the reticle by a discharging device. The method includes forming a photoresist layer over a semiconductor substrate. The method includes securing the semiconductor substrate by a wafer electrostatic-clamp. The method also includes patterning the photoresist layer by emitting radiation from a radiation source via the reticle.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Hsiao-Lun Tainan, TW 15 18
Chen, Li-Jui Hsinchu, TW 306 606
Cheng, Po-Chung Zhongpu Township, Chiayi County, TW 162 297
Fu, Tzung-Chi Miaoli, TW 70 299
Hsu, Che-Chang Taichung, TW 25 22
Kuo, Chueh-Chi Kaohsiung, TW 25 8
Lee, Tsung-Yen Jhudong Township, Hsinchu County, TW 41 177

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Nov 14, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Nov 14, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 14, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00