Laser apparatus and electronic device manufacturing method
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United States of America Patent
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May 7, 2024
Grant Date -
Nov 25, 2021
app pub date -
Aug 10, 2021
filing date -
Mar 13, 2019
priority date (Note) -
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Abstract
A laser apparatus includes an output coupling mirror; a grating that constitutes an optical resonator together with the output coupling mirror; a laser chamber in an optical path of the optical resonator; at least one prism in an optical path between the laser chamber and the grating; a rotary stage including an actuator that rotates the prism to change an incident angle of a laser beam from the laser chamber on the grating; a wavelength measuring unit that measures a central wavelength of the laser beam from the laser chamber through the output coupling mirror; an angle sensor that detects a rotation angle of the prism; a first control unit that controls the actuator at a first operation frequency; and a second control unit that controls the actuator at a second operation frequency.
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