Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
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United States of America Patent
Stats
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May 7, 2024
Grant Date -
Jul 13, 2017
app pub date -
Jun 24, 2015
filing date -
Jun 30, 2014
priority date (Note) -
In Force
status (Latency Note)
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Importance

US Family Size
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Non-US Coverage
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Abstract
Cleaning compositions and processes for cleaning post-plasma etch residue from a microelectronic device having said residue thereon. The composition achieves highly efficacious cleaning of the residue material, including titanium-containing, copper-containing, tungsten-containing, and/or cobalt-containing post-etch residue from the microelectronic device while simultaneously not damaging the interlevel dielectric, metal interconnect material, and/or capping layers also present thereon.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
WO | A1 | WO2016003729 | Jun 24, 2015 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
INTERNATIONAL APPLICATION PUBLISHED WITH INTERNATIONAL SEARCH REPORT | AQUEOUS AND SEMI-AQUEOUS CLEANERS FOR THE REMOVAL OF POST-ETCH RESIDUES WITH TUNGSTEN AND COBALT COMPATIBILITY | Jan 07, 2016 | |||
KR | B1 | KR102405063 | Jun 24, 2015 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PATENT SPECIFICATION | 텅스텐 및 코발트 상용성을 갖는 에치후 잔류물을 제거하기 위한 수성 및 반-수성 세정제 | Jun 07, 2022 | |||
CN | B | CN107155367 | Jun 24, 2015 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
GRANTED PATENT FOR INVENTION | Aqueous and semi-aqueous cleaners utilizing tungsten and cobalt compatibility to remove post-etch residue | Dec 21, 2021 | |||
TW | B | TWI713458 | Jun 29, 2015 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
GRANTED PATENT OR PATENT OF ADDITION | AQUEOUS AND SEMI-AQUEOUS CLEANERS FOR THE REMOVAL OF POST-ETCH RESIDUES WITH TUNGSTEN AND COBALT COMPATIBILITY | Dec 21, 2020 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
MORGAN STANLEY SENIOR FUNDING INC | 1300 THAMES STREET 4TH FLOOR BALTIMORE MD 21231 |
International Classification(s)

- 2015 Application Filing Year
- H01L Class
- 25498 Applications Filed
- 22451 Patents Issued To-Date
- 88.06 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Cooper, Emanuel I | Scarsdale, US | 71 | 1001 |
# of filed Patents : 71 Total Citations : 1001 | |||
Lippy, Steven | Brookfield, US | 13 | 325 |
# of filed Patents : 13 Total Citations : 325 | |||
Song, Lingyan | Danbury, US | 12 | 138 |
# of filed Patents : 12 Total Citations : 138 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 1 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Nov 7, 2027 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 7, 2031 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 7, 2035 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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