Photomask and its manufacturing method

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United States of America Patent

PATENT NO 11977325
APP PUB NO 20220244633A1
SERIAL NO

17595518

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Abstract

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Some embodiments of the present application provide a photomask and its manufacturing method. The photomask includes: a substrate and a light shielding layer located on the substrate, an opening for exposing a surface of the substrate being formed in the light shielding layer; a barrier layer, the barrier layer covering a side wall of the opening and having its bottom contacted with the substrate.

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Patent Owner(s)

Patent OwnerAddress
CHANGXIN MEMORY TECHNOLOGIES INC230601 NO 388 XINGYE AVENUE AIRPORT INDUSTRIAL PARK HEFEI ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE ANHUI PROVINCE HEFEI CITY ANHUI PROVINCE 230601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kong, Zhineng Hefei, CN 2 0
Zhang, Xiuxuan Hefei, CN 2 0

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