MEMS resonator

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United States of America Patent

PATENT NO 11975965
APP PUB NO 20230416081A1
SERIAL NO

18340815

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Abstract

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Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.

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Patent Owner(s)

Patent OwnerAddress
SITIIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doll, Joseph C Mountain View, US 23 164
Grosjean, Charles I Los Gatos, US 61 247
Hagelin, Paul M Saratoga, US 72 552
Hill, Ginel C Sunnyvale, US 28 110
Miller, Nicholas Sunnyvale, US 53 644

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