Minimal contact gripping of thin optical devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11975422
APP PUB NO 20230094653A1
SERIAL NO

18061327

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Abstract

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Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahamed, Yaseer Arafath Austin, US 6 6
Godet, Ludovic Sunnyvale, US 327 3246
Riordon, Benjamin B Newburyport, US 39 494
Strassner, James D Austin, US 25 73
Wang, Kangkang San Jose, US 36 48

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