Hybrid structure for surface acoustic wave device and associated production method

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United States of America Patent

PATENT NO 11974505
APP PUB NO 20210057635A1
SERIAL NO

17044132

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Abstract

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A hybrid structure for a surface acoustic wave device comprises a working layer of piezoelectric material assembled with a support substrate having a lower coefficient of thermal expansion than that of the working layer, and an intermediate layer located between the working layer and the support substrate. The intermediate layer is a sintered composite layer formed from powders of at least a first material and a second material different from the first.

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Patent Owner(s)

Patent OwnerAddress
SOITECPARC TECHNOLOGIQUE DES FONTAINES CHEMIN DES FRANQUES BERNIN 38190

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allibert, Frédéric Grenoble, FR 19 130
Veytizou, Christelle Bernin, FR 16 25

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