MEMS nanopositioner and method of fabrication

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United States of America Patent

PATENT NO 11973441
APP PUB NO 20220368249A1
SERIAL NO

17645229

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Abstract

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A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM210 WEST 7TH STREET AUSTIN TX 78701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alipour, Afshin Richardson, US 2 1
Coskun, Mustafa Bulut Pasadena, US 2 1
Moheimani, Seyed Omid Reza Allen, US 6 5

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