Abnormal wafer image classification

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United States of America Patent

PATENT NO 11972552
APP PUB NO 20210334608A1
SERIAL NO

17237516

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Abstract

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A semiconductor image classifier. Convolution functions are applied to modify the wafer images in order to extract key information about the image. The modified images are condensed then processed through a series of pairwise classifiers, each classifier configured to determine that the image is more like one of the pair than the other. Probabilities from each classifier are collected to form a prediction for each image.

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PDF SOLUTIONS INC333 W SAN CARLOS ST STE 1000 SAN JOSE CA 95110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burch, Richard McKinney, US 17 57
David, Jeffrey Drue San Jose, US 126 1680
Honda, Tomonori Santa Clara, US 17 54
Zhu, Qing Rowlett, US 122 1035

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