Inspection apparatus and inspection method
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United States of America Patent
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Apr 30, 2024
Grant Date -
Nov 2, 2023
app pub date -
Jul 11, 2023
filing date -
Jan 31, 2022
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Abstract
An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.
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