Measurement system and measurement method

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United States of America

PATENT NO 11971296
SERIAL NO

17392216

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Abstract

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A measurement method of receiving an emission light output from an optical semiconductor element on an incident end surface of an optical probe, shifts a relative position between the optical semiconductor element and the optical probe on a plane surface intersecting with an optical axis of the emission light, measures an incident intensity of the emission light at several positions, and obtains an incident intensity pattern showing a relationship between a change in the relative position and the respective incident intensities.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA NIHON MICRONICSMUSASHINO-SHI TOKYO 180-8508

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukushi, Jukiya Aomori, JP 6 4
Harako, Shou Aomori, JP 7 4
Narita, Hisao Aomori, JP 10 47
Okuta, Michitaka Tokyo, JP 14 122
Saito, Tomokazu Aomori, JP 21 23
Saito, Yuki Tokyo, JP 66 404
Takeya, Toshinaga Aomori, JP 6 21

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