Ferroelectric device based on hafnium zirconate and method of fabricating the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11968841
APP PUB NO 20220254795A1
SERIAL NO

17650154

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A ferroelectric device, for instance, a metal-ferroelectric-metal (MFM) capacitor, a ferroelectric random access memory (Fe-RAM), or a ferroelectric field effect transistor (FeFET), is provided. In one aspect, the ferroelectric device is based on hafnium zirconate (HZO). The ferroelectric device can include a first electrode and a second electrode, and a doped HZO layer, which is arranged between the first electrode and the second electrode. The doped HZO layer can include a ferroelectric layer and at least two non-zero remnant polarization charge states. The doped HZO layer can be doped with at least two different elements selected from the lanthanide series, or with a combination of at least one element selected from the lanthanide series and at least one rare earth element.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
IMEC VZWLEUVEN

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Popovici, Mihaela Ioana Haasrode, BE 16 45
Van, Houdt Jan Bekkevoort, BE 31 448
Walke, Amey Mahadev Heverlee, BE 16 42

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Oct 23, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 23, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 23, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00