Ion current droop compensation
Number of patents in Portfolio can not be more than 2000
United States of America
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Apr 23, 2024
Grant Date -
N/A
app pub date -
Oct 4, 2021
filing date -
Oct 4, 2021
priority date (Note) -
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Abstract
A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.
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