Measurement apparatus and a method for determining a substrate grid

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United States of America Patent

PATENT NO 11966166
APP PUB NO 20210341846A1
SERIAL NO

17377648

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Abstract

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A measurement apparatus and method for determining a substrate grid describing a deformation of a substrate prior to exposure of the substrate in a lithographic apparatus configured to fabricate one or more features on the substrate. Position data for a plurality of first features and/or a plurality of second features on the substrate is obtained. Asymmetry data for at least a feature of the plurality of first features and/or the plurality of second features is obtained. The substrate grid based on the position data and the asymmetry data is determined. The substrate grid and asymmetry data are passed to the lithographic apparatus for controlling at least part of an exposure process to fabricate one or more features on the substrate.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bijnen, Franciscus Godefridus Casper Valkenswaard, NL 47 355
Hulsebos, Edo Maria Waalre, NL 22 83
Megens, Henricus Johannes Lambertus Waalre, NL 18 467
Socha, Robert John Campbell, US 27 542
Zhang, Youping Cupertino, US 67 2240

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