Inorganic wave plate and manufacturing method therefor

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United States of America Patent

PATENT NO 11966068
APP PUB NO 20210072446A1
SERIAL NO

17054404

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Abstract

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Provided is a structural birefringence-type inorganic wave plate having excellent heat resistance and durability, and a fine pattern. Also provided is a manufacturing method for an inorganic wave plate by which, even in the case of a fine pattern, productivity is high, and a desired phase difference is easily achieved and stably obtained. This inorganic wave plate is obtained by utilizing a selective interaction between a polymer having a repeating unit containing a carbonyl group, and a metallic oxide precursor, the inorganic wave plate having a wire grid structure provided with a transparent substrate, and grid-shaped protruding portions arranged at a pitch shorter than the wavelength of light in a used band on at least one surface of the transparent substrate and extending in a predetermined direction, the main component of the grid-shaped protruding portion being a metallic oxide.

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Patent Owner(s)

Patent OwnerAddress
DEXERIALS CORPORATION1724 SHIMOTSUBOYAMA SHIMOTSUKE-SHI TOCHIGI 323-0194

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuno, Yusuke Tokyo, JP 26 79
Sakakibara, Shigeshi Tokyo, JP 13 13
Shibuya, Kazuyuki Tokyo, JP 53 330
Sugawara, Toshiaki Tokyo, JP 28 122
Takada, Akio Tokyo, JP 71 561

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