Device and method for operating a bending beam in a closed control loop

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United States of America Patent

PATENT NO 11965910
APP PUB NO 20230251285A1
SERIAL NO

18128690

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Abstract

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The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one control loop using a bit depth greater than the bit depth of the controlled variable; and (c) at least one second interface designed to provide a manipulated variable of the at least one control loop.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baur, Christof Darmstadt, DE 44 310
Demski, Florian Mühltal, DE 3 2

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