Microelectromechanical sensor and sensing module thereof

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United States of America Patent

PATENT NO 11965852
APP PUB NO 20230213466A1
SERIAL NO

17719342

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Abstract

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A microelectromechanical sensor includes a base, a heater provided on the base, and a sensing electrode including a sensing portion. The heater includes a heating portion. The heater and the sensing electrode are provided at different layers in a stacking direction, and the sensing electrode is electrically insulated from the heater. On a reference plane in the stacking direction, a projection of the sensing portion of the sensing electrode is entirely covered by a projection of the heating portion of the heater.

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Patent Owner(s)

  • (6) INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Ming-Fa Taoyuan, TW 524 4489
Kuo, Pei-Chi Tainan, TW 3 0
Lee, Bor-Shiun New Taipei, TW 19 8

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