Additive manufacturing of polishing pads

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United States of America Patent

PATENT NO 11965103
APP PUB NO 20210054222A1
SERIAL NO

16996744

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Abstract

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A formulation, system, and method for additive manufacturing of a polishing pad. The formulation includes monomer, dispersant, and nanoparticles. A method of preparing the formulation includes adding a dispersant that is a polyester derivative to monomer, adding metal-oxide nanoparticles to the monomer, and subjecting the monomer having the nanoparticles and dispersant to sonication to disperse the nanoparticles in the monomer.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bajaj, Rajeev Fremont, US 162 3380
Chockalingam, Ashwin Murugappan San Jose, US 6 19
Ganapathiappan, Sivapackia Los Altos, US 234 1902
Luo, Yingdong San Jose, US 46 108
Madhusoodhanan, Sudhakar Sunnyvale, US 11 110
Ng, Hou T Campbell, US 242 6041
Patibandla, Nag B Pleasanton, US 159 2040
Redfield, Daniel Morgan Hill, US 65 1172
Sridhar, Uma Sunnyvale, US 10 15
Zhang, Daihua Los Altos, US 59 154

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