Apparatus and method of forming a polishing article that has a desired zeta potential
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United States of America
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Apr 23, 2024
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app pub date -
Oct 23, 2019
filing date -
Oct 23, 2019
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Abstract
Implementations described herein generally relate to polishing articles and methods of manufacturing polishing articles used in polishing processes and cleaning processes. More particularly, implementations disclosed herein relate to composite polishing articles having graded properties. In one implementation, a polishing article is provided. The polishing article comprises one or more exposed first regions formed from a first material and having a first zeta potential and one or more second exposed regions formed from a second material and having a second zeta potential, wherein the first zeta potential is different from the second zeta potential.
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