Device for detecting plasma of ultra fast with multi channel
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United States of America Patent
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Apr 16, 2024
Grant Date -
Jul 14, 2022
app pub date -
Oct 12, 2021
filing date -
Jan 11, 2021
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Abstract
Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.
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