Vacuum chamber arrangement for charged particle beam generator

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United States of America Patent

PATENT NO 11961627
APP PUB NO 20230386696A1
SERIAL NO

18326935

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Abstract

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The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Urbanus, Willem Henk Delft, NL 14 55
Van, Veen Alexander Hendrik Vincent Rotterdam, NL 30 314
Wieland, Marco Jan-Jaco Delft, NL 104 1084

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