Meta-lens structure and method of fabricating the same
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United States of America
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Apr 16, 2024
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app pub date -
Oct 14, 2019
filing date -
Oct 14, 2019
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Abstract
Various embodiments may provide a method of fabricating a meta-lens structure. The method may include forming a first dielectric layer in contact with a silicon wafer. The method may also include forming a second dielectric layer in contact with the first dielectric layer. A refractive index of the second dielectric layer may be different from a refractive index of the first dielectric layer. The method may further include, in patterning the second dielectric layer. The method may additionally include removing at least a portion of the silicon wafer to expose the first dielectric layer.
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