Method of determining an X and Y location of a surface particle
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United States of America Patent
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Apr 16, 2024
Grant Date -
Oct 12, 2023
app pub date -
Apr 8, 2022
filing date -
Apr 8, 2022
priority date (Note) -
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Abstract
A system including a modulator, a laser source, a mirror, a laser sensor, and a processor. The modulator is movable in a first direction. The laser source is configured to emit laser light in a direction parallel to the surface of the modulator. The mirror is configured to redirect the laser light. The laser sensor is configured to detect a first change in intensity when a particle on the surface of the modulator passes through the laser light emitted by the laser source. The laser sensor is further configured to detect a second change in intensity when the particle on the surface of the modulator passes through the laser light redirected by the at least one mirror. The processor is configured to determine an X-Y location of the particle based on the first change in intensity and the second change in intensity.
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