Electrostatic chuck with high insulation performance and electrostatic attraction force
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Apr 9, 2024
Grant Date -
N/A
app pub date -
Aug 31, 2021
filing date -
Aug 31, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base and is thinner than the ceramic base. The electrostatic electrode is embedded between the ceramic dielectric layer and the ceramic base. The ceramic insulating layer is positioned on the ceramic dielectric layer and is thinner than the ceramic dielectric layer. The ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer, and the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer.
First Claim
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International Classification(s)
- 2021 Application Filing Year
- B23Q Class
- 536 Applications Filed
- 208 Patents Issued To-Date
- 38.81 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B23Q Class
- 0 % this patent is cited more than
- 1 Age
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