Piezoelectric micromachined ultrasonic transducer sensor apparatuses, systems, and methods
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United States of America
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Apr 9, 2024
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Dec 24, 2022
filing date -
Dec 24, 2022
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Abstract
Apparatuses, systems, and methods include a PMUT mechanically coupled to, and electrically isolated from, a receive sensor via a common flexible membrane. The receive sensor may be an optical sensor or a receive only PMUT providing a feedback signal based on a received waveform, VRO(t), to modify the drive voltage Vd(t) of the PMUT. The feedback signal may be used to modify the drive voltage Vd(t) of the PMUT to shorten the ring-down period and may be based on the received waveform, VRO(t), and a desired receive waveform, VROD(t), which may be selected to optimize one or more of Q, bandwidth, resonant frequency, and spectral content of the drive voltage Vd(t). The drive voltage Vd(t) may be modified to a minimize a difference between VRO(t), and a desired receive waveform, VROD(t), or a closed loop weighted (α, β) sum of the energy of VRO (t) and the blind zone duration.
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