Gas management system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 2, 2024
Grant Date -
Nov 12, 2020
app pub date -
Feb 15, 2018
filing date -
Feb 15, 2018
priority date (Note) -
In Force
status (Latency Note)
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Importance

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Abstract
A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
CYMER LLC | 17075 THORNMINT COURT SAN DIEGO CA 92127 |
International Classification(s)

- 2018 Application Filing Year
- H01S Class
- 1463 Applications Filed
- 1171 Patents Issued To-Date
- 80.05 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Gillespie, Walter Dale | Poway, US | 10 | 0 |
# of filed Patents : 10 Total Citations : 0 | |||
Kanawade, Dinesh Adinath | San Diego, US | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Luo, Edward Siqi | San Diego, US | 6 | 1 |
# of filed Patents : 6 Total Citations : 1 | |||
Roman, Gutierrez Yzzer | Escondido, US | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 0 Citation Count
- H01S Class
- 0 % this patent is cited more than
- 1 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Oct 2, 2027 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 2, 2031 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 2, 2035 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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