Lithographic systems and methods of operating the same

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United States of America Patent

PATENT NO 11947271
APP PUB NO 20230095872A1
SERIAL NO

18074600

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Abstract

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A lithographic system for projecting an image onto a workpiece using radiation is provided. The lithographic system includes: a support structure for supporting a workpiece; a radiation source for providing radiation to project an image on the workpiece; a reticle positioned between the radiation source and the workpiece; and a mask positioned adjacent the reticle, the mask being configured to block radiation from the radiation source, the mask including a heat removal apparatus.

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Patent Owner(s)

Patent OwnerAddress
KULICKE & SOFFA LITEQ B VESP 314 AE EINDHOVEN 5633

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Boeij Jeroen 's-Hertogenbosch, NL 8 32
Loktev, Mikhail Yurievich Valkenswaard, NL 5 2

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