Low-loss and wide-band acoustic delay lines using x-cut and y-cut lithium niobate piezoelectric thin films

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United States of America

PATENT NO 11942920
SERIAL NO

17073059

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Abstract

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A piezoelectric thin film (PTF) is located above a carrier substrate. The PTF may be X-cut LiNbO3 thin film adapted to propagate an acoustic wave in at least one of a first mode excited by an electric field oriented in a longitudinal direction along a length of the PTF or a second mode excited by the electric field oriented at least partially in a thickness direction of the PTF. A first interdigitated transducer (IDT) is disposed on a first end of the PTF. The first IDT is to convert a first electromagnetic signal, traveling in the longitudinal direction, into the acoustic wave. A second IDT is disposed on a second end of the PTF with a gap between the second IDT and the first IDT. The second IDT is to convert the acoustic wave into a second electromagnetic signal.

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Patent Owner(s)

Patent OwnerAddress
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS506 SOUTH WRIGHT STREET 352 HENRY ADMINISTRATION BLDG URBANA IL 61801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garcia, Tomas Manzaneque Voorburg, NL 3 0
Gong, Songbin Champaign, US 30 456
Lu, Ruochen Champaign, US 15 227
Yang, Yansong Urbana, US 12 13

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