Particle measurement device, three-dimensional shape measurement device, prober device, particle measurement system, and particle measurement method
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United States of America Patent
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Mar 26, 2024
Grant Date -
Dec 28, 2023
app pub date -
Aug 31, 2023
filing date -
Aug 31, 2023
priority date (Note) -
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Abstract
The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.
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