Methods and apparatus for pressure based mass flow ratio control

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United States of America Patent

PATENT NO 11940307
APP PUB NO 20220390261A1
SERIAL NO

17342341

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Abstract

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A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ding, Junhua Boxborough, US 49 1040

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