Impurity control during formation of aluminum nitride crystals and thermal treatment of aluminum nitride crystals

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United States of America

PATENT NO 11939700
SERIAL NO

17496867

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In various embodiments, single-crystal aluminum nitride boules and substrates are formed from the vapor phase with controlled levels of impurities such as carbon. Single-crystal aluminum nitride may be heat treated via quasi-isothermal annealing and controlled cooling to improve its ultraviolet absorption coefficient and/or Urbach energy.

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CRYSTAL IS INC70 COHOES AVENUE GREEN ISLAND NY 12183

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bondokov, Robert T Watervliet, US 43 826
Chen, Jianfeng Ballston Lake, US 122 682
Grandusky, James R Waterford, US 31 317
Kimura, Toru Tokyo, JP 131 1240
Miebach, Thomas Malta, US 24 555
Schowalter, Leo J Latham, US 87 1665
Wang, Shichao Troy, US 25 56
Yamaoka, Keisuke Fuji, JP 50 571

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