Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus

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United States of America Patent

PATENT NO 11938563
APP PUB NO 20190255650A1
SERIAL NO

16342151

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Abstract

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An annealed workpiece manufacturing method of irradiating a workpiece with laser light and annealing the workpiece includes a support step of supporting the workpiece, and an irradiation step of irradiating the supported workpiece with the laser light. In the support step, at least in a laser light irradiation area for the workpiece, the workpiece is supported by a cam member whose upper end height position is adjusted according to a rotation position.

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Patent Owner(s)

Patent OwnerAddress
JSW AKTINA SYSTEM CO LTD2-1 FUKUURA 2-CHOME KANAZAWA-KU YOKOHAMA-SHI KANAGAWA 2360004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chung, Suk-Hwan Kanagawa, JP 15 30

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