Laser reflow apparatus and laser reflow method

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United States of America Patent

PATENT NO 11935863
APP PUB NO 20210202431A1
SERIAL NO

17123318

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser reflow apparatus reflows solder bumps disposed on a side of a semiconductor chip in a workpiece and included in an irradiation range on the workpiece by applying a laser beam to an opposite side of the semiconductor chip. The laser reflow apparatus includes a spatial beam modulation unit including a laser power density setting function to locally set the laser power density in the irradiation range of a laser beam emitted from a laser beam source, and an image focusing unit including an image focusing function to focus the laser beam emitted from the laser beam source and apply the focused laser beam to the irradiation range on the workpiece.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhiwen Tokyo, JP 30 38
Ikku, Yuki Tokyo, JP 12 2
Kim, Youngsuk Tokyo, JP 71 424
Kimura, Nobuyuki Tokyo, JP 87 593
Kobayashi, Satoshi Tokyo, JP 278 3266

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