Etching platinum-containing thin film using protective cap layer

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United States of America Patent

PATENT NO 11929423
APP PUB NO 20210313179A1
SERIAL NO

17347715

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Abstract

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A microelectronic device includes a substrate a platinum-containing layer over the substrate. The platinum-containing layer includes a first segment and a second segment adjacent to the first segment, and has a first surface and a second surface opposite the first surface closer to the substrate than the first surface. A first spacing between the first segment and the second segment at the first surface is greater than a second spacing between the first segment and the second segment at the second surface. A width of the first segment along the first surface is less than twice a thickness of the first segment, and the second spacing is less than twice the thickness of the first segment.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD M/S 3999 DALLAS 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Meier, Sebastian Munich, DE 33 21
Mittelstaedt, Mike Berglern, DE 4 7
Rinck, Helmut Moosburg, DE 18 57

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