Inspection apparatus and inspection method
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United States of America Patent
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Mar 12, 2024
Grant Date -
Nov 2, 2023
app pub date -
Jul 11, 2023
filing date -
Jan 31, 2022
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Abstract
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.
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