Sensor and a system
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United States of America Patent
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Mar 12, 2024
Grant Date -
Nov 18, 2021
app pub date -
Dec 4, 2020
filing date -
May 14, 2020
priority date (Note) -
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Abstract
A sensor includes a metal object and a thin film stack formed on at least a part of a surface of the metal object. The thin film stack has an electrically isolating film and a metallic film thereon. A first electrical conductor is defined in the metallic film and is electrically isolated from the metal object and has, in a first end, a connection point connected to a first terminal via a wire and, in a second end, a sensor structure defined in the metallic film. The sensor structure includes a junction of the metallic film penetrating the electrically isolating film to the metal object forming a thermocouple and a metal object terminal connected to a connection point of the metal object via a wire. The connection points of the first electrical conductor and of the metal object are adjacent to and in an isothermal relation with each other.
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