Vacuum pump
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United States of America Patent
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-
Mar 12, 2024
Grant Date -
Jul 28, 2022
app pub date -
Dec 20, 2021
filing date -
Jan 22, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A vacuum pump comprises: a rotor; a stator; a first heating section configured to heat the stator cylindrical portion to a temperature for reducing product accumulation; an exhaust pipe provided at a housing storing the rotor and the stator to discharge gas discharged by the rotor and the stator to an outside of the housing; a second heating section configured to heat the exhaust pipe to a temperature for reducing product accumulation; and a gas passage container arranged in the housing, having an inlet port into which gas discharged through a gap between the rotor cylindrical portion and the stator cylindrical portion flows and an outlet port from which inflow gas flows to the exhaust pipe, and heated to a temperature for reducing product accumulation. A gas-inflow-side end portion of the exhaust pipe is inserted into the outlet port of the gas passage container through a clearance.
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