Apparatuses including elongate pillars of access devices
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United States of America
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Mar 5, 2024
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N/A
app pub date -
Dec 8, 2021
filing date -
Dec 8, 2021
priority date (Note) -
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Abstract
A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.
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