System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

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United States of America

PATENT NO 11921297
SERIAL NO

17682919

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Abstract

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A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONMILPITAS CALIFORNIA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Mountain View, US 73 532
Derstine, Matthew Los Gatos, US 29 281
Sherbak, Nikolay Moscow, RU 2 1
Stepanov, Andrey Moscow, RU 4 4

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