Inspection apparatus and inspection method
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United States of America Patent
Stats
-
Mar 5, 2024
Grant Date -
Nov 2, 2023
app pub date -
Jul 11, 2023
filing date -
Jan 31, 2022
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.
First Claim
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International Classification(s)
- 2023 Application Filing Year
- H01J Class
- 1721 Applications Filed
- 298 Patents Issued To-Date
- 17.32 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Sep 5, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Sep 5, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Sep 5, 2035 |
