Valve and fluid control device including valve
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United States of America Patent
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Mar 5, 2024
Grant Date -
Jan 7, 2021
app pub date -
Sep 23, 2020
filing date -
Apr 24, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A valve includes a first plate having a first vent hole; a second plate defining a valve chamber, which communicates with the first vent hole, between the second plate and the first plate, the second plate having a second vent hole that communicates with the valve chamber and that does not face the first vent hole; and a movable plate having a third vent hole that faces the second vent hole and disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate. The second plate has an auxiliary hole that does not face the third vent hole in the movable plate, the auxiliary hole being surrounded by an edge portion that forms a first corner portion having a substantially convex rounded shape in front view of a principal surface of the second plate at a side facing the valve chamber.
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