Microelectromechanical resonator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11916534
APP PUB NO 20220337218A1
SERIAL NO

17847438

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Abstract

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A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doll, Joseph C Mountain View, US 23 164
Grosjean, Charles I Los Gatos, US 61 247
Hagelin, Paul M Saratoga, US 72 552
Hill, Ginel C Sunnyvale, US 28 110
Miller, Nicholas Sunnyvale, US 53 644

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