Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same

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United States of America Patent

PATENT NO 11915920
APP PUB NO 20220406552A1
SERIAL NO

17768017

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Abstract

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The present invention provides a simpler method for sharpening a tip of an emitter. In addition, the present invention provides an emitter including a nanoneedle made of a single crystal material, an emitter including a nanowire made of a single crystal material such as hafnium carbide (HfC), both of which stably emit electrons with high efficiency, and an electron gun and an electronic device using any one of these emitters. A method for manufacturing the emitter according to an embodiment of the present invention comprises processing a single crystal material in a vacuum using a focused ion beam to form an end of the single crystal material, through which electrons are to be emitted, into a tapered shape, wherein the processing is performed in an environment in which a periphery of the single crystal material fixed to a support is opened.

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Patent Owner(s)

Patent OwnerAddress
NATIONAL INSTITUTE FOR MATERIALS SCIENCE2-1 SENGEN 1-CHOME TSUKUBA-SHI IBARAKI 305-0047

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Ta-Wei Ibaraki, JP 22 136
Hono, Kazuhiro Ibaraki, JP 40 412
Ohkubo, Tadakatsu Ibaraki, JP 16 106
Qin, Luchang Ibaraki, JP 15 90
Tang, Jie Ibaraki, JP 235 1468
Tang, Shuai Ibaraki, JP 11 70
Uzuhashi, Jun Ibaraki, JP 3 0

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