Two piece electrode assembly with gap for plasma control

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11915911
APP PUB NO 20200328065A1
SERIAL NO

16915028

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Abstract

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An apparatus for distributing plasma products includes first and second electrodes that each include planar surfaces. The first electrode forms first apertures from a first planar surface to a second planar surface; the second electrode forms second apertures from the third planar surface to the fourth planar surface. The electrodes couple through one or more adjustable couplers such that the third planar surface is disposed adjacent to the second planar surface with a gap therebetween, the gap having a gap distance. Each of the adjustable couplers has a range of adjustment. The first and second apertures are arranged such that for at least one position within the ranges of adjustment, none of the first apertures aligns with any of the second apertures to form an open straight-line path extending through both the first and second electrodes.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Tae Seung San Jose, US 21 1170
Kim, Tae Wan San Jose, US 165 844
Loh, Lok Kee San Francisco, US 6 955
Lubomirsky, Dmitry Cupertino, US 306 29707
Schatz, Kenneth D Los Altos, US 30 1026
Singh, Saravjeet Sunnyvale, US 77 2220
Tan, Tien Fak Campbell, US 21 2138

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