Method for operating a particle beam microscope

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United States of America Patent

PATENT NO 11915907
APP PUB NO 20220246389A1
SERIAL NO

17590148

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Abstract

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A method for operating a particle beam microscopy system includes recording a first particle-microscopic image at a given first focus and varying the excitations of the first deflection device within a given first range. The method also includes changing the focus to a second focus, and determining a second range of excitations of the first deflection device on the basis of the first range, the first excitation, the second excitation and a machine parameter determined in advance. The method further includes recording a second particle-microscopic image at the second focus and varying the excitations of the first deflection device within the determined second range. The second range of excitations is determined so that a region of the object represented in the second particle-microscopic image was also represented in the first particle-microscopic image.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Diemer, Simon Lauchheim, DE 9 18
Preikszas, Dirk Oberkochen, DE 43 372

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