Micromachined ultrasonic transources with dual out-of-plane and in-plane actuation and displacement
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United States of America Patent
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Feb 27, 2024
Grant Date -
Jul 14, 2022
app pub date -
Jan 12, 2021
filing date -
Jan 12, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A capacitive transducer is provided. The capacitive transducer includes a plate including a protruding center mass and a substrate with a center depression configured to accept the center mass. The capacitive transducer also includes a first electrode coupled to a non-horizontal edge surface of the center mass and a second electrode coupled to a non-horizontal edge surface of the center depression. The capacitive transducer further includes a third electrode coupled to a horizontal edge surface of the center mass and a fourth electrode coupled to a horizontal edge surface of the center depression. The plate is coupled to the substrate at least along an outer perimeter area of the plate and the substrate.
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