Ground-connected supports with insulating spacers for semiconductor memory capacitors and method of fabricating the same

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United States of America Patent

PATENT NO 11910593
APP PUB NO 20210159230A1
SERIAL NO

17032655

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Abstract

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A semiconductor device may comprise: a plurality of lower electrodes which are on a substrate; a first electrode support which is between adjacent lower electrodes and comprises a metallic material; a dielectric layer which is on the lower electrodes and the first electrode support to extend along profiles of the first electrode support and each of the lower electrodes; and an upper electrode which is on the dielectric layer.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-CITY KYUNGKI-DO 441-373

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Yoon Young Seoul, KR 23 42
Kim, Seung Jin Hwaseong-si, KR 94 787
Lee, Byung-Hyun Hwaseong-si, KR 29 152
Park, Sang Jae Seoul, KR 21 51

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