Bipolar staggered comb drive for bidirectional MEMS actuation

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United States of America Patent

PATENT NO 11909332
APP PUB NO 20210367536A1
SERIAL NO

17395314

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

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Patent Owner(s)

Patent OwnerAddress
BEIJING VOYAGER TECHNOLOGY CO LTDNO 8 DONGBEIWANG WEST ROAD BUILDING 34 2ND FLOOR NO 218 BEIJING

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kong, Lingkai Palo Alto, US 64 376
Lu, Yue Los Gatos, US 144 485
Wang, Youmin Berkeley, US 181 189
Zhou, Qin Mountain View, US 97 364

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