Method for extreme ultraviolet lithography mask treatment

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United States of America Patent

PATENT NO 11906897
APP PUB NO 20210311383A1
SERIAL NO

17350685

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Abstract

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A reflective mask includes a reflective multilayer over a substrate, a capping layer over the reflective multilayer, an absorber layer over the capping layer and including a top surface, and a protection layer directly on the top surface of the absorber layer. The absorber layer is formed of a first material and the protection layer is formed of a second material that is less easily to be oxidized than the first material.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDHSINCHU

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Jong-Yuh Hsinchu County, TW 27 64
Hsu, Pei-Cheng Taipei, TW 111 530
Lee, Hsin-Chang Hsinchu County, TW 203 1090
Lien, Ta-Cheng Hsinchu County, TW 104 198
Su, Yih-Chen Taichung, TW 11 35
Tsai, Chi-Kuang Hsinchu, TW 3 7
Wang, Tzu Yi Hsinchu, TW 11 14

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